Location History:
- Villach, AT (2019)
- Villach, AU (2020)
Company Filing History:
Years Active: 2019-2020
Title: Innovator Spotlight: Daniel Brien
Introduction
Daniel Brien, an esteemed inventor based in Villach, Australia, is recognized for his groundbreaking contributions to substrate processing technology. With an impressive tally of two patents, Brien has demonstrated a commitment to innovation in the field, particularly in enhancing efficiency and effectiveness in processing wafer-shaped articles.
Latest Patents
Daniel Brien's latest inventions showcase his expertise and creativity. One of his notable patents is the "Spin chuck with concentrated center and radial heating." This substrate processing system is designed to hold and rotate a substrate securely, featuring a heating assembly that heats the substrate's opposite surface. It incorporates a main heater assembly equipped with a plurality of light-emitting diodes (LEDs) arranged on a printed circuit board. Additionally, it includes a nozzle stack cap that dispenses liquid onto the substrate’s center while a radiant heat source efficiently heats the substrate's first surface.
Another significant patent is the "Apparatus and radiant heating plate for processing wafer-shaped articles." This innovative apparatus includes a rotary chuck that holds a wafer-shaped article of a specific diameter and features a radiant heating plate designed to improve processing efficiency. The heating plate is equipped with radiant heating elements, while its central region is strategically free from them. It utilizes refraction elements to direct emitted radiation towards the central area, enhancing thermal processing without compromising the substrate's integrity.
Career Highlights
Daniel Brien has made remarkable strides in his career at Lam Research AG, a leading company in semiconductor manufacturing equipment. His role involves collaborative innovation and research, pushing the boundaries of existing technologies. Brien's dedication and innovative spirit have positioned him as a valuable asset in the world of substrate processing.
Collaborations
Throughout his career, Daniel has worked alongside talented colleagues, including Bridget Hill and Michael Puggl. These collaborations enrich the innovative environment at Lam Research AG, fostering creativity and mutual growth among the team.
Conclusion
Daniel Brien's contributions to substrate processing technologies demonstrate his expertise and commitment to innovation. His patented inventions reflect a forward-thinking approach that drives advancements in the industry. As a part of Lam Research AG, Brien's collaborative efforts with peers further enhance the company's reputation for pioneering technology and strive to improve processes that will shape the future of semiconductor manufacturing.