Daniel Boecker

Title: The Innovative Contributions of Daniel Boecker

Introduction

Daniel Boecker is a notable inventor based in Aalen, Germany. He has made significant contributions to the field of semiconductor sample inspection. His work focuses on enhancing the capabilities of multi-beam particle microscopes, which are essential tools in various scientific and industrial applications.

Latest Patents

Daniel Boecker holds a patent for a method titled "Method for area-wise inspecting a sample via a multi-beam particle microscope, computer program product and multi-beam particle microscope for semiconductor sample inspection." This innovative method involves providing position data for multiple areas on a sample that require inspection. It includes a first raster arrangement of individual particle beams, each assigned a single field of view on the sample. The method defines a nominal scanning area within each field of view, determines individual position deviations, and adjusts the raster arrangement accordingly. This allows for precise area-wise scanning of the sample using the individual particle beams.

Career Highlights

Daniel Boecker is currently employed at Carl Zeiss Multisem GmbH, a company renowned for its advanced optical and electron microscopy technologies. His role involves developing innovative solutions that enhance the performance and accuracy of particle microscopes. His expertise in this area has contributed to the advancement of semiconductor inspection techniques.

Collaborations

Daniel collaborates with Dirk Zeidler, a fellow professional in the field. Together, they work on projects that aim to push the boundaries of current technologies in particle microscopy.

Conclusion

Daniel Boecker's contributions to the field of semiconductor sample inspection through his innovative patent demonstrate his commitment to advancing technology. His work at Carl Zeiss Multisem GmbH and collaboration with colleagues further highlight his impact in the industry.