Company Filing History:
Years Active: 1976-1992
Title: The Innovative Contributions of Dan L Burt
Introduction
Dan L Burt is a notable inventor based in Phoenix, AZ, who has made significant contributions to the field of semiconductor technology. With a total of 4 patents to his name, Burt's work focuses on improving metallization processes and enhancing the performance of semiconductor devices.
Latest Patents
One of Burt's latest patents is a metallization process that describes an improved method for depositing TiW/TiWN/TiW/Au metallization. This process provides superior adhesion properties and excellent barrier properties, making it suitable for metal line widths of one micron or smaller. To achieve these properties, it is crucial to ensure that the layer immediately underlying the gold layer is substantially pure TiW, deposited in a nitrogen-free sputtering atmosphere. The gas supply manifolds and deposition chamber are purged and evacuated following the deposition of the TiW layer and prior to the deposition of the TiWN layer. Additionally, a final TiW layer is placed on top of the gold layer to act as an etching mask.
Another significant patent by Burt involves metallization means and methods for high-temperature applications. This innovation allows semiconductor devices with resistor regions to operate at higher temperatures while improving bond pull strength. By using a single layer, such as Ni--Cr, as a combined resistive and barrier layer, the device can prevent interdiffusion of silicon and aluminum. The Ni--Cr layer also serves as thin film resistor material, enhancing the overall performance of the semiconductor device.
Career Highlights
Dan L Burt has had a distinguished career at Motorola Corporation, where he has been instrumental in advancing semiconductor technologies. His innovative approaches have led to significant improvements in device performance and reliability.
Collaborations
Throughout his career, Burt has collaborated with esteemed colleagues, including George F Anderson and Richard F Taraci. These partnerships have fostered a collaborative environment that has contributed to the success of their projects.
Conclusion
Dan L Burt's contributions to the field of semiconductor technology through his innovative patents and work at Motorola Corporation highlight his importance as an inventor. His advancements in metallization processes and high-temperature applications continue to influence the industry.