Damon K DeBusk

Title: Damon K DeBusk: Innovator in Semiconductor Fabrication

Introduction

Damon K DeBusk is a notable inventor based in Austin, TX, who has made significant contributions to the field of semiconductor fabrication. With a total of 5 patents to his name, DeBusk has focused on optimizing manufacturing processes for silicon substrates.

Latest Patents

One of his latest patents is a manufacturing method for wafer slice starting material that optimizes extrinsic gettering during semiconductor fabrication. This innovative method involves diffusing phosphorous ions into the backside surface of a silicon substrate during wafer slice manufacture. By forming gettering sites at the backside surface prior to gate polysilicon deposition, extrinsic gettering is effectively optimized. Initially, both the frontside and backside surfaces of the silicon substrate are subjected to dopant materials. Subsequently, at least one thin film is formed on both surfaces. The thin films are then removed from the frontside surface along with a layer of silicon immediately below it to a depth of about 10.0 µm. The final polishing step removes a layer of silicon to a depth of about 10.0 µm at the frontside surface, allowing this manufacturing method to be easily incorporated into standard silicon wafer manufacturing processes. It is estimated that at least 99 percent of the dopants introduced into the frontside surface are removed with the upper 10.0 µm of silicon. The thin films on the backside surface remain, preventing outgassing of dopant impurities during subsequent thermal processing steps. Additionally, a polysilicon thin film formed over the backside surface may provide an extra source of extrinsic gettering.

Career Highlights

Throughout his career, Damon K DeBusk has worked with prominent companies such as Advanced Micro Devices Corporation and Air Products and Chemicals, Inc. His experience in these organizations has contributed to his expertise in semiconductor technologies and manufacturing processes.

Collaborations

DeBusk has collaborated with notable professionals in the field, including Bruce L Pickelsimer and Andre Lagendijk. These collaborations have further enriched his work and innovations in semiconductor fabrication.

Conclusion

Damon K DeBusk is a distinguished inventor whose work in optimizing semiconductor manufacturing processes has made a significant impact in the industry. His innovative methods and collaborations continue to influence advancements in semiconductor technology.