Company Filing History:
Years Active: 1986-2006
Title: Dale J Aldrich: Innovator in Chemical-Mechanical Planarization
Introduction
Dale J Aldrich is a notable inventor based in Lake Jackson, TX (US), recognized for his contributions to the field of chemical-mechanical planarization. With a total of 6 patents, Aldrich has made significant advancements in manufacturing processes that are essential for semiconductor device fabrication.
Latest Patents
Aldrich's latest patents include a method of manufacturing a fixed abrasive material. This innovative method involves creating a fixed abrasive material suitable for use in CMP planarization pads from an aqueous polymer dispersion that includes abrasive particles. The process entails frothing the polymer dispersion, applying it to a substrate, mold, or carrier, and curing it to form a fixed abrasive material with an open cell structure containing between about 5 and 85 wt % abrasive particles and a dry density ranging from about 350 kg/m³ to 1200 kg/m³. Another significant patent focuses on materials and methods for low-pressure chemical-mechanical planarization. This invention allows for the chemical mechanical planarization of material layers using a down force of less than about 2.5 psi while maintaining a material removal rate similar to that achieved with higher down forces. This innovation improves the selectivity of the process concerning a primary material formed over a barrier material, particularly in metallization operations during semiconductor device fabrication.
Career Highlights
Throughout his career, Aldrich has worked with prominent companies such as Dow Global Technologies LLC and The Dow Chemical Company. His work has significantly impacted the semiconductor industry, particularly in enhancing the efficiency and effectiveness of planarization processes.
Collaborations
Aldrich has collaborated with notable professionals in his field, including Sudhakar Balijepalli and Laura A Grier, who have contributed to his innovative projects and research endeavors.
Conclusion
Dale J Aldrich's contributions to the field of chemical-mechanical planarization have established him as a key figure in semiconductor manufacturing innovation. His patents reflect a commitment to advancing technology and improving manufacturing processes.