Koshi, Japan

Daiki Shibata

This inventor holds 5 USPTO granted patents and 3 published patent applications. Top assignee: Tokyo Electron Limited. Active years: 2018-2025.

USPTO Granted Patents = 5 

% Patents Active = 100.0

Average Co-Inventor Count = 3.0

ph-index = 2

Forward Citations = 7(Granted Patents)


Company Filing History:


Years Active: 2018-2025

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5 patents (USPTO):Explore Patents

Title: Daiki Shibata: Innovator in Substrate Processing Technology

Introduction

Daiki Shibata is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 5 patents. His innovative designs and methods have advanced the efficiency and effectiveness of various processing apparatuses.

Latest Patents

Shibata's latest patents include a tank designed for substrate processing. This tank features a container part with an upper wall, sidewall, and bottom wall to store processing liquid. It includes a liquid discharge passage positioned above the liquid surface to discharge processing liquid into the container. Additionally, a gas discharge passage is installed to introduce gas into the container, enhancing the processing capabilities. Another notable patent is a liquid treatment apparatus that incorporates a substrate holder, discharge nozzle, and gas pipe for temperature adjustment of the treatment liquid. This innovative design allows for precise control over the treatment process, ensuring optimal results.

Career Highlights

Daiki Shibata is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work has been instrumental in developing advanced technologies that improve substrate processing methods. His expertise and innovative spirit have positioned him as a key figure in his field.

Collaborations

Shibata has collaborated with notable coworkers, including Takashi Yamauchi and Kohei Kawakami. These partnerships have fostered a creative environment that encourages the development of cutting-edge technologies.

Conclusion

Daiki Shibata's contributions to substrate processing technology exemplify his dedication to innovation. His patents and work at Tokyo Electron Limited highlight his role as a leading inventor in the industry. His ongoing efforts continue to shape the future of substrate processing.

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