Dae J Lim

Title: Dae J Lim: Innovator in Semiconductor Technology

Introduction

Dae J Lim is a prominent inventor based in Fremont, CA, specializing in semiconductor technology. He has made significant contributions to the field, holding a total of 2 patents that focus on improving processes in semiconductor manufacturing.

Latest Patents

His latest patents include innovative methods for silicon electrode assembly etch rate and etch uniformity recovery. These methods involve cleaning an electrode assembly, which can be used for etching a dielectric material in a plasma etching chamber after the cleaning process. The technique comprises polishing a silicon surface of the electrode assembly to remove black silicon contamination. Another notable patent is related to relative lateral motion in linear Chemical Mechanical Planarization (CMP) systems. This invention promotes greater polishing uniformity by introducing a relative lateral motion between a CMP belt and a rotating polish head that secures a wafer.

Career Highlights

Dae J Lim is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on enhancing the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Throughout his career, Dae has collaborated with notable colleagues, including Tuochuan Huang and Daxing Ren, contributing to advancements in semiconductor technology.

Conclusion

Dae J Lim's innovative work in semiconductor technology, particularly in the areas of electrode assembly and CMP systems, showcases his commitment to advancing the field. His contributions are vital for the ongoing development of efficient semiconductor manufacturing processes.