This inventor holds 1 USPTO granted patent. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2010.
Company Filing History:
Years Active: 2010
Title: Da-Hsiang Chen: Innovator in Wafer Cleaning Technology
Introduction
Da-Hsiang Chen is a notable inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of wafer cleaning technology. His innovative approach has led to the development of a unique system that enhances the efficiency of wafer cleaning processes.
Latest Patents
Da-Hsiang Chen holds a patent for a "System for cleaning a wafer." This system includes at least one first chuck roller connected to a first roller base, featuring a first annular groove. A second roller base opposes the first roller base, and at least one second chuck roller is connected to the second roller base, which includes a second annular groove. Additionally, a sensing chuck roller is connected to the second roller base and features a third annular groove that corresponds to the first and second annular grooves. A cleaning member covers the third annular groove, allowing the circumferential edge of the wafer to be positioned in the first and second annular grooves while abutting the cleaning member. The first and second chuck rollers rotate the wafer, enabling the circumferential edge to rub against the cleaning member, thus enhancing the cleaning process.
Career Highlights
Da-Hsiang Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work focuses on improving manufacturing processes and ensuring high-quality standards in semiconductor production.
Collaborations
Throughout his career, Da-Hsiang Chen has collaborated with esteemed colleagues, including Tien-Chen Hu and Wen-Jin Lee. These collaborations have fostered innovation and contributed to advancements in wafer cleaning technologies.
Conclusion
Da-Hsiang Chen's contributions to wafer cleaning technology exemplify his commitment to innovation in the semiconductor industry. His patent and collaborative efforts highlight the importance of teamwork in driving technological advancements.