Claudia Yevenes

Title: Innovations by Claudia Yevenes in Microelectronics

Introduction

Claudia Yevenes is an accomplished inventor based in White Plains, NY (US). She has made significant contributions to the field of microelectronics, particularly in the area of etching compositions and methods. Her innovative work has led to the development of a patent that enhances the manufacturing processes of microelectronic devices.

Latest Patents

Claudia Yevenes holds a patent for "Compositions and methods for selectively etching silicon nitride films." This invention relates to compositions and methods for the selective wet etching of a surface of a microelectronic device that contains both silicon nitride (SiN) and polysilicon. The etching composition comprises phosphoric acid, certain polysilicon corrosion inhibitors, and specific silanes. The combination of these components significantly improves the selectivity of the silicon nitride etching composition in the presence of polysilicon. She has 1 patent to her name.

Career Highlights

Claudia Yevenes is currently employed at Entegris, Inc., where she continues to innovate and contribute to advancements in microelectronics. Her work is pivotal in enhancing the efficiency and effectiveness of etching processes used in the industry.

Collaborations

Claudia has collaborated with notable colleagues, including Steven M Bilodeau and Juhee Yeo. These collaborations have further enriched her research and development efforts in the field.

Conclusion

Claudia Yevenes is a remarkable inventor whose work in microelectronics has led to significant advancements in etching technologies. Her contributions are vital to the ongoing evolution of microelectronic device manufacturing.