Company Filing History:
Years Active: 2007-2008
Title: Chunyuan Chao: Innovator in Semiconductor Technology
Introduction
Chunyuan Chao is a notable inventor based in Fremont, CA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on innovative methods that enhance the functionality and efficiency of semiconductor materials.
Latest Patents
Chao's latest patents include a method of providing contact via to a surface of a semiconductor material. This patent describes a contact via that is produced by anisotropically etching a dielectric layer placed on via openings. A protective layer is applied to the surface of the semiconductor material to safeguard the substrate. An initial etch through an interlayer dielectric creates an initial via that extends toward, but not into, the substrate, retaining a portion of the protective layer on the substrate. The final contact via is then created by penetrating the protective layer to open a via to the surface of the semiconductor material.
Another significant patent involves the dynamically controllable reduction of vertical contact diameter through the adjustment of the etch mask stack for dielectric etch. This patent details the creation of inwardly-tapered openings in an Anti-Reflection Coating (ARC) layer beneath a patterned photoresist layer. The smaller bottom width dimensions of these openings are utilized to define further openings in an interlayer dielectric region, which separates the active layers of an integrated circuit from its first major interconnect layer. A taper-inducing etch recipe is employed to create the inwardly-tapered ARC openings, using a mixture of CF4 and CHF3 with a volumetric inflow ratio that is substantially less than 5 to 1.
Career Highlights
Chunyuan Chao is currently employed at Promos Technologies, Inc., where he continues to innovate in semiconductor technology. His work has been instrumental in advancing the capabilities of integrated circuits and enhancing their performance.
Collaborations
Chao collaborates with talented individuals in his field, including Kuei-Chang Tsai and George Kovall. Their combined expertise contributes to the innovative projects at Promos Technologies, Inc.
Conclusion
Chunyuan Chao is a prominent figure in semiconductor innovation, with a focus on enhancing the efficiency and functionality of semiconductor materials. His patents reflect his commitment to advancing technology in this critical field.