Chungwei Wang

Title: Innovations of Chungwei Wang in Semiconductor Technology

Introduction

Chungwei Wang is a notable inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to design and measurement techniques.

Latest Patents

One of his latest patents is focused on a test key design to enable X-ray scatterometry measurement. This method involves forming a test key by creating a first plurality of semiconductor strips and cutting them into an array of a second plurality of semiconductor strips. Each row of the array is formed from one strip in the first plurality of semiconductor strips. The process includes forming isolation regions in recesses between the second plurality of semiconductor strips and recessing these isolation regions. The top portions of the second plurality of semiconductor strips protrude higher than the isolation regions, forming semiconductor fins that create a fin array. An X-ray beam is projected onto the test key, and a diffraction pattern is obtained from the scattered X-ray beam.

Career Highlights

Chungwei Wang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to push the boundaries of semiconductor innovation. His work has been instrumental in advancing measurement techniques that are crucial for the semiconductor industry.

Collaborations

He has collaborated with notable coworkers such as Shyh-Shin Ferng and Chung-Li Huang, contributing to a dynamic and innovative work environment.

Conclusion

Chungwei Wang's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in measurement techniques and semiconductor design.