Company Filing History:
Years Active: 1999
Title: **Innovative Contributions of Chung-En Hsu in Semiconductor Technologies**
Introduction
Chung-En Hsu, an accomplished inventor based in Hsin-Chu, Taiwan, has made significant strides in the field of semiconductor technologies. With a total of two patents to his name, he has developed processes that enhance optical imaging and integrated circuit fabrication. His contributions are vital to the ongoing evolution of electronic components and systems.
Latest Patents
Chung-En Hsu's recent patents include innovative advancements in microlens formation and aluminum plug metallization processes.
1. **Microlens Process**: This patent describes a process for forming a microlens either directly on a substrate or as part of an optical imaging array manufacturing process. The technique begins with the deposition of a silicon oxide layer over the substrate, which determines the lens-to-substrate distance. Layers of polysilicon and silicon nitride follow, with the latter patterned to create a mask for oxidation. As a result, the formed oxide body is lens-shaped and becomes a biconvex microlens once the silicon nitride and polysilicon are removed. The process can also yield a plano-convex lens by applying a coating of SOG.
2. **Aluminum Plug Process**: This patent introduces a new method of aluminum plug metallization for integrated circuit devices. An insulating layer is applied over a semiconductor substrate, featuring a contact opening. A barrier metal layer coats the insulating layer and contact opening before an aluminum layer is sputter deposited. With careful thermal annealing, the aluminum fills the contact opening, allowing for efficient metallization during circuit fabrication.
Career Highlights
Chung-En Hsu is affiliated with Taiwan Semiconductor Manufacturing Company Limited, where he applies his skills and expertise in advancing semiconductor technologies. His innovative approach to microlens and aluminum plug processes showcases his commitment to enhancing product performance and manufacturing efficiency.
Collaborations
Throughout his career, Chung-En Hsu has worked alongside talented individuals such as Ji-Chung Huang and Yea-Dean Sheu. Their collaborative efforts within the semiconductor industry have contributed to significant advancements and improvements in technology.
Conclusion
Chung-En Hsu’s innovative spirit and technical prowess in developing key semiconductor processes position him as a notable inventor in the industry. His patents not only reflect his dedication to innovation but also play an essential role in the ongoing progression of semiconductor technologies. As the industry evolves, the impact of his work will undoubtedly resonate within the engineering community and beyond.