Chun Pheng Tan

Title: Innovations of Inventor Chun Pheng Tan

Introduction

Chun Pheng Tan is a notable inventor based in Singapore, known for his contributions to the field of micro-electromechanical systems (MEMS) and solvent delivery systems. With a total of 2 patents, he has made significant advancements in technology that enhance the performance and reliability of various devices.

Latest Patents

One of his latest patents is a MEMS microphone, which includes a substrate with a cavity, a diaphragm supported by the substrate, and a back plate above the diaphragm. This design features a first preset gap between the back plate and the diaphragm, along with a support member that enhances the robustness and anti-dropping capability of the microphone. Another significant patent is for an apparatus and method for detecting bad edge bead removal in a spin-on-glass coater tool. This invention involves a solvent delivery system that detects leaks in a solvent pressure tank, ensuring optimal performance and safety during the edge bead removal process.

Career Highlights

Chun Pheng Tan has worked with prominent companies such as Chartered Semiconductor Manufacturing Ltd and Aac Technologies Pte. Ltd. His experience in these organizations has contributed to his expertise in developing innovative solutions in the semiconductor and electronics industries.

Collaborations

Throughout his career, Chun has collaborated with talented individuals, including Soon Chye Chan and Bak Hong Chia, who have contributed to his projects and innovations.

Conclusion

Chun Pheng Tan's work exemplifies the spirit of innovation in technology, particularly in MEMS and solvent delivery systems. His patents reflect a commitment to enhancing device performance and reliability, making him a significant figure in the field of invention.