The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2002
Filed:
Oct. 12, 2000
Chartered Semiconductor Manufacturing Ltd., Singapore, SG;
Abstract
A solvent delivery system for an edge bead removal tool (EBR) that detects N leaks in a solvent pressure tank that surrounds a solvent bottle. A solvent bottle is surrounded by a pressure tank. The solvent bottle contains the solvent used in the EBR tool. A N gas supply is connected to the pressure tank and pressurizes the inside of the pressure tank with N gas. A pressure sensor is connected to the pressure tank. The pressure sensor senses the N pressure inside of the pressure tank. The system board notifies an operator when the pressure sensor detects an unsatisfactory N pressure condition inside the pressure tank. The solvent bottle contains a solvent. A buffer solvent is in the solvent buffer tank. A solvent level sensor is on the solvent buffer tank. The solvent level sensor is connected to the interlock circuit. Wherein the system board notifies an operator when the solvent level sensor detects an unsatisfactory buffer solvent level in the solvent tank. A buffer solvent delivery line is connected from the solvent buffer tank to a nozzle over a substrate. The interlock circuit is connected to the system user board by a circuit to board line.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile