Chun-hung Ko

Title: The Innovative Contributions of Chun-hung Ko

Introduction

Chun-hung Ko is a notable inventor based in Taipei, Taiwan. He has made significant contributions to the field of optical engineering, particularly through his innovative patent related to scatterometry methods. His work focuses on enhancing the accuracy and efficiency of determining grating profiles, which is crucial in various technological applications.

Latest Patents

Chun-hung Ko holds a patent for a "Scatterometry method with characteristic signatures matching." This system and method efficiently and accurately determine grating profiles by utilizing characteristic signature matching in a discrepancy enhanced library generation process. By applying light scattering theory, a series of scattering signatures versus scattering angles or wavelengths are generated based on designed grating parameters such as critical dimension, thickness, and line-to-space ratio. The method selects characteristic portions of the signatures wherever their discrepancy exceeds preset criteria, reforming a characteristic signature library for quick and accurate matching. A rigorous coupled wave theory can be employed to generate a diffraction library, which includes a plurality of simulated diffraction spectrums based on predetermined structural parameters of the grating. The characteristic region of these simulated diffraction spectrums is determined by assessing if the root mean square error exceeds the noise level of a measuring machine. The diffraction intensity of the measured spectrum is then compared with that of the simulated spectrums in the characteristic region to select a match spectrum, ultimately deciding the structural parameters of the grating based on this match.

Career Highlights

Throughout his career, Chun-hung Ko has worked with esteemed organizations such as the Industrial Technology Research Institute and Nanometrics Inc. His experience in these institutions has allowed him to refine his skills and contribute to advancements in optical measurement technologies.

Collaborations

Chun-hung Ko has collaborated with notable professionals in his field, including Nigel Peter Smith and Yi-Sha Ku. These collaborations have further enriched his work and expanded the impact of his innovations.

Conclusion

Chun-hung Ko's contributions to the field of scatterometry and optical engineering demonstrate his commitment to innovation and excellence. His patent reflects a significant advancement in the accurate determination of grating profiles, showcasing his expertise and dedication to the field.