This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: United Microelectronics Corp.. Active years: 2008-2013.
Location History:
- Chang-Hua Hsien, TW (2008)
- Changhua County, TW (2013)
Company Filing History:
Years Active: 2008-2013
Title: The Innovative Contributions of Chun-Hsing Tung
Introduction
Chun-Hsing Tung is a notable inventor based in Changhua, Taiwan. He has made significant contributions to the field of technology, particularly in the area of substrate carriers and physical vapor deposition processes. With a total of 2 patents, his work has garnered attention for its innovative approaches and practical applications.
Latest Patents
Chun-Hsing Tung's latest patents include a substrate carrier and applications thereof. This substrate carrier is designed for performing a deposition process and comprises a supporting element and a cover element. The supporting element, which features a through hole, is utilized to carry a substrate. The cover element is removably engaged with the supporting element, securing the substrate in place while exposing a deposition surface through the hole. Another significant patent is the process of physical vapor depositing a mirror layer with improved reflectivity. This process involves loading a wafer into a PVD tool that includes a degas chamber, a Ti/TiN sputter deposition chamber, a cooling chamber, and an aluminum sputter deposition chamber. The wafer undergoes a degas process, followed by the deposition of titanium and aluminum layers, achieving a reflectivity of about 0.925 at a wavelength of around 380 nm.
Career Highlights
Chun-Hsing Tung is currently employed at United Microelectronics Corporation, where he continues to innovate and contribute to advancements in semiconductor technology. His work has been instrumental in enhancing the efficiency and effectiveness of deposition processes in the industry.
Collaborations
Chun-Hsing Tung has collaborated with notable coworkers, including Huai-Hsuan Tsai and Chih-Sheng Chang. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies.
Conclusion
Chun-Hsing Tung's contributions to the field of technology through his patents and work at United Microelectronics Corporation highlight his role as an influential inventor. His innovative approaches to substrate carriers and deposition processes continue to impact the industry positively.