Chu-Ming Ma

Title: Chu-Ming Ma: Semiconductor and Memory-Device Inventor.

Introduction

Chu-Ming Ma is an inventor based in Hsinchu, Taiwan. His patent work includes semiconductor isolation structures and memory-device fabrication. The supplied information lists 2 patents and identifies Macronix International Co., Ltd. as his company.

Latest Patents

Ma’s listed patents address methods for forming semiconductor trenches and fabricating memory devices.

“Methods of Forming a Semiconductor Trench and Forming Dual Trenches, and Structure for Isolating Devices” describes isolation structures formed in a substrate with periphery and array areas. The periphery-area structure has a profile with at least three steps, while the array-area structure has a profile with at least two steps.

“Process for Fabricating Memory Device” describes a memory device with data-storage structures, control gates, and a dielectric layer between them. Each data-storage structure has a lower part and a narrower upper part. The fabrication process forms the upper parts by recessing a data-storage layer, then divides the recessed portions to create the lower parts.

Career Highlights

Ma’s listed inventions focus on semiconductor manufacturing processes and device structures. His work includes approaches to forming stepped isolation structures and shaping data-storage structures in memory devices.

Collaborations

The supplied information names Tian-Shuan Luo and Tin-Wei Wu as Ma’s coworkers. It does not specify their roles in the listed patents.

Conclusion

Chu-Ming Ma’s patent portfolio, as described here, reflects work on semiconductor isolation and memory-device fabrication at Macronix International Co., Ltd.