Christian Steigerwald

Title: Christian Steigerwald: Innovator in Illumination Optics

Introduction

Christian Steigerwald is a notable inventor based in Heidenheim, Germany. He has made significant contributions to the field of illumination optics, particularly in the area of extreme ultraviolet (EUV) microlithography. His work is essential for advancing technologies used in semiconductor manufacturing.

Latest Patents

Christian holds a patent for "Illumination optics for EUV microlithography and related system and apparatus." This innovative patent focuses on guiding an illumination light bundle from a radiation source to an object field. The design features an extension ratio between a longer field dimension and a shorter field dimension, where the ratio is considerably greater than 1. This advancement is crucial for enhancing the precision and efficiency of microlithography processes.

Career Highlights

Christian Steigerwald is currently employed at Carl Zeiss SMT GmbH, a leading company in optical systems and technologies. His role at the company allows him to work on cutting-edge projects that push the boundaries of optical engineering. His expertise and innovative mindset have positioned him as a key player in the field.

Collaborations

Christian has collaborated with talented individuals such as Damian Fiolka and Berndt Warm. These partnerships have fostered a creative environment that encourages the development of groundbreaking technologies in illumination optics.

Conclusion

Christian Steigerwald's contributions to illumination optics, particularly in EUV microlithography, highlight his innovative spirit and dedication to advancing technology. His work at Carl Zeiss SMT GmbH and his collaborations with esteemed colleagues further emphasize his impact in the field.