Location History:
- Constance, DE (2014)
- Aalen, DE (2012 - 2015)
Company Filing History:
Years Active: 2012-2015
Title: The Innovative Mind of Christian Hettich
Introduction
Christian Hettich, an accomplished inventor based in Aalen, Germany, has made significant contributions to the field of optical engineering. With a strong focus on microlithography and optical systems, Hettich holds three patents that reflect his expertise and innovative spirit.
Latest Patents
Among his latest patents, Hettich has developed an "Illumination System of a Microlithographic Projection Exposure Apparatus.” This innovative system includes at least one transmission filter, which possesses varying transmittance at different positions. This feature is arranged between a pupil plane and a field plane, allowing for field-dependent corrections on ellipticity without adversely affecting telecentricity or irradiance uniformity. Another noteworthy patent is the "Method for Measuring an Optical System," which outlines a novel approach to testing optical systems using first and second test beams. This method enables precise measurement of optical paths and the spatial diagnosis distribution of reference surface properties.
Career Highlights
Hettich's career revolves around his pivotal role at Carl Zeiss SMT GmbH, a company renowned for its cutting-edge advancements in optical technology. His work has significantly impacted the development of high-precision optical systems essential in various applications, including semiconductor manufacturing and lithography.
Collaborations
Throughout his career, Hettich has had the opportunity to collaborate with esteemed colleagues such as Nils Dieckmann and Manfred Maul. These collaborations have fostered creativity and innovation, further amplifying the contributions made by Hettich in the realm of optical engineering.
Conclusion
Christian Hettich stands out as an influential inventor in the field of optical systems. His patented innovations not only demonstrate his technical prowess but also reflect his dedication to advancing the industry. As he continues to explore new frontiers in microlithography and optics, Hettich's work remains a testament to the power of innovation in technology.