The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2014
Filed:
Jun. 07, 2013
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Thomas Korb, Schwaebisch Gmuend, DE;
Christian Hettich, Constance, DE;
Michael Layh, Altusried, DE;
Ulrich Wegmann, Koenigsbronn, DE;
Karl-Heinz Schuster, Koenigsbronn, DE;
Matthias Manger, Aalen-Unterkochen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
First test beams (-), after passing through an optical system on optical paths that differ in pairs, impinge on a first measurement region () at angles that differ in pairs with respect to the measurement plane. Second test beams (-), after passing through the optical system on optical paths that differ in pairs, impinge on a second measurement region () at angles that differ in pairs, wherein the second region differs from the first. A value of a first measurement variable of the test beam at the first region is detected for each of the first test beams, and comparably for a second measurement variable at the second region for the second test beams. Impingement regions (-) on reference surface(s) () of the optical system are determined and a spatial diagnosis distribution of a property of the reference surface(s) for each test beam is calculated.