Company Filing History:
Years Active: 2002-2005
Title: Chris Ngai: Innovator in Silicon Carbide Technology
Introduction
Chris Ngai is a prominent inventor based in Burlingame, CA (US). He has made significant contributions to the field of semiconductor technology, particularly in the area of silicon carbide deposition. With a total of 4 patents to his name, Ngai's work has advanced the capabilities of integrated circuit applications.
Latest Patents
One of Ngai's latest patents focuses on the process of depositing silicon carbide for use as a low dielectric constant anti-reflective coating. This invention provides a method for depositing silicon carbide using a silane-based material under specific process parameters. The resulting anti-reflective coating (ARC) is suitable for integrated circuit applications. Notably, the thickness of the silicon carbide ARC remains largely independent of the underlying layer thickness, which contrasts with traditional methods that require adjustments for reflectivity. Another aspect of this invention includes a substrate with a silicon carbide anti-reflective coating that has a dielectric constant of less than about 7.0, ideally around 6.0 or less.
Career Highlights
Chris Ngai is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work at Applied Materials has allowed him to explore innovative solutions that enhance the performance of semiconductor devices. Ngai's expertise in silicon carbide technology has positioned him as a key player in the field.
Collaborations
Throughout his career, Ngai has collaborated with notable colleagues, including Christopher Dennis Bencher and Judy H Huang. These collaborations have fostered an environment of innovation and have contributed to the advancement of semiconductor technologies.
Conclusion
Chris Ngai's contributions to silicon carbide technology and his innovative patents have made a significant impact in the semiconductor industry. His work continues to influence the development of advanced materials for integrated circuits.