This inventor holds 2 USPTO granted patents. Top assignee: Micron Technology Incorporated. Active years: 1992-2004.
Location History:
- Meridian, ID (US) (1992)
- Boise, ID (US) (2004)
Company Filing History:
Years Active: 1992-2004
Title: Chris L Inman: Innovator in Semiconductor Technology
Introduction
Chris L Inman is a notable inventor based in Boise, ID (US). He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on innovative methods for forming and filling openings in semiconductor structures.
Latest Patents
Inman’s latest patents include a "Structure and method for forming a faceted opening and a layer filling therein." This invention describes a process where a first layer of material is formed over a layer that requires an opening. A faceted opening is created in the first layer, followed by the formation of the opening in the underlying layer. The material intended to fill the opening is then deposited over the faceted opening and into the underlying layer's opening. Another significant patent is the "One chamber in-situ etch process for oxide and conductive material." This method allows for the anisotropic etching of an oxide/silicide/poly sandwich structure on a silicon wafer substrate using a single parallel plate plasma reactor chamber. The process includes both an oxide etch step and a silicide/poly etch step, performed as plasma etch steps, enabling a continuous etch without removing the wafer from the reactor chamber.
Career Highlights
Chris L Inman is currently employed at Micron Technology Incorporated, where he continues to advance semiconductor technology. His innovative approaches have contributed to the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Inman has collaborated with notable coworkers such as David S Becker and Mark Bossler, further enhancing the innovative environment at Micron Technology.
Conclusion
Chris L Inman is a distinguished inventor whose work in semiconductor technology has led to valuable patents and advancements in the field. His contributions continue to shape the future of semiconductor manufacturing.