Chris Chih-Chien Young

Title: An Insight into the Innovations of Chris Chih-Chien Young

Introduction: Chris Chih-Chien Young is an esteemed inventor based in Palo Alto, California. With a notable patent to his name, Young has made significant contributions to the field of scanner technology. His innovative work focuses on improving scanner performance through advanced matching techniques.

Latest Patents: The patent held by Young is titled "Scanner performance comparison and matching using design and defect data." This invention presents a system and method for matching multiple scanners utilizing design and defect data. The process involves a golden wafer being processed with a golden tool, while a second wafer is processed using an alternative tool. Both tools are capable of focus and exposure modulation. The invention provides a unique approach for evaluating scanner behavior by comparing wafer-level spatial signatures of critical structures on both wafers. Critical structures are identified by binning defects found on the golden wafer with similar patterns. If the signatures of the two wafers do not match within a specified percentage, the second tool is classified as a 'no match.' Additionally, reticles can be analyzed in a similar fashion, processing using a golden reticle alongside a second reticle.

Career Highlights: Chris Chih-Chien Young has established himself professionally at Kla Tencor Corporation, where he has contributed significantly to the advancement of scanner technologies. His expertise in the field has enabled him to develop innovative solutions that enhance the performance and reliability of scanning equipment.

Collaborations: Throughout his career, Young has collaborated with several talented individuals, including coworkers Allen Park and Ellis Chang. Together, they have worked on various projects that push the boundaries of what is possible in scanning technology.

Conclusion: Chris Chih-Chien Young continues to lead in innovation within the field of scanning technologies. His patent, along with his collaborative efforts at Kla Tencor Corporation, mark him as a pivotal figure in enhancing scanner performance, ensuring that advancements are made through meticulous research and development. Young's contributions significantly impact the technology landscape, paving the way for future innovations.