Misia, Malaysia

Chong Wee Lim


Average Co-Inventor Count = 5.0

ph-index = 8

Forward Citations = 209(Granted Patents)


Location History:

  • Singapore, SG (2000)
  • J.B., MY (2001)
  • Johor Bahru, MY (2001)
  • Tmn. Century, MY (2001)
  • Misia, MY (2001 - 2002)

Company Filing History:


Years Active: 2000-2002

where 'Filed Patents' based on already Granted Patents

8 patents (USPTO):

Title: Innovations of Chong Wee Lim

Introduction

Chong Wee Lim is a notable inventor based in Misia, Malaysia. He has made significant contributions to the field of semiconductor technology, holding a total of 8 patents. His work primarily focuses on improving the fabrication processes of sub-micron devices.

Latest Patents

One of his latest patents is the "Silicon nitride capped shallow trench isolation method for fabricating sub-micron devices with borderless contacts." This innovative process enhances the fabrication of MOSFETs in shallow trench isolation (STI) with sub-quarter micron ground rules. The method incorporates a passivating trench cap layer of silicon nitride, which is crucial for forming borderless or "unframed" electrical contacts without compromising the poly to poly spacing. The selective etch process utilized during the contact hole opening ensures that the passivating silicon nitride trench cap layer remains intact, thereby protecting the P-N junction at the edge of the trench region. This advancement improves device reliability by preventing electrical short circuits and reducing overall diode leakage. Additionally, the silicon nitride trench cap safeguards the underlying STI trench oxide during cleaning processes and minimizes transistor junction leakage.

Career Highlights

Chong Wee Lim has worked with prominent organizations, including Chartered Semiconductor Manufacturing Ltd and the National University of Singapore. His experience in these institutions has allowed him to collaborate with other experts in the field and contribute to groundbreaking innovations.

Collaborations

Some of his notable coworkers include Soh Yun Siah and Eng Hua Lim. Their collective efforts have further advanced the research and development of semiconductor technologies.

Conclusion

Chong Wee Lim's contributions to semiconductor technology through his innovative patents and collaborations have significantly impacted the industry. His work continues to pave the way for advancements in the fabrication of sub-micron devices.

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