This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2022-2025.
Company Filing History:
Years Active: 2022-2025
Title: Innovations of Chiu Hua Chen in Semiconductor Technology
Introduction
Chiu Hua Chen is a prominent inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on enhancing semiconductor-on-insulator (SOI) substrates, which are crucial for modern electronic devices.
Latest Patents
Chiu Hua Chen's latest patents include innovative RFSOI semiconductor structures that feature a nitrogen-doped charge-trapping layer. This technology involves a semiconductor-on-insulator (SOI) substrate that consists of a handle substrate, a charge-trapping layer made of nitrogen-doped polysilicon, an insulating layer, and a semiconductor material layer. The incorporation of nitrogen atoms in the charge-trapping layer plays a vital role in suppressing grain growth during annealing processes. This reduction in grain growth minimizes distortion of the SOI substrate and facilitates the precise overlay of lithographic patterns during the fabrication of semiconductor devices. Additionally, the charge-trapping layer helps to suppress the formation of a parasitic surface conduction layer, thereby reducing capacitive coupling of the semiconductor devices with the handle substrate during high-frequency operations, such as those in the gigahertz range.
Career Highlights
Chiu Hua Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise and innovative approaches have positioned him as a valuable asset in the development of advanced semiconductor technologies.
Collaborations
Chiu Hua Chen collaborates with fellow inventor Cheng-Ta Wu, contributing to the advancement of semiconductor research and development.
Conclusion
Chiu Hua Chen's contributions to semiconductor technology through his patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as an influential inventor in the field. His innovations continue to shape the future of electronic devices.