Chiou-Mei Chen

Title: Innovator Spotlight: Chiou-Mei Chen

Introduction

Chiou-Mei Chen, a noted inventor based in Hsinchu, Taiwan, has made significant contributions to the field of materials science and cleaning technologies. With two patents under his name, he is dedicated to advancing methods that enhance the efficiency and effectiveness of surface treatments.

Latest Patents

Chiou-Mei Chen's latest patents showcase innovative techniques aimed at improving substrate surface treatments. The first patent, titled "Method and Apparatus for Treating a Substrate Surface by Bubbling," reveals a novel approach to removing substances from substrate surfaces, including stripping photoresist from wafers. This method involves parallel arrangements of substrates immersed in a liquid, where ozone gas is introduced. The process enhances mass transfer across the liquid boundary layer, allowing for swift reactions and effective treatments.

The second patent, "Method for Removing Impurities from Porous Materials," describes a technique utilizing supercritical fluids to cleanse porous materials without harmful solvents. By flowing supercritical fluid over materials that contain nanometer-level pores, this method efficiently removes trapped impurities while conserving water. This environmentally friendly approach is both highly efficient and innovative, demonstrating Chen's commitment to sustainable technology.

Career Highlights

Chiou-Mei Chen is associated with the Industrial Technology Research Institute, an esteemed research institution in Taiwan that focuses on technological advancement and innovation. His work there has not only contributed to his own research but also to the institute's mission of fostering high-tech developments.

Collaborations

Throughout his career, Chiou-Mei Chen has worked alongside notable colleagues, including Kon-Tsu Kin and Pei-Lin Chang. Collaborative efforts with these professionals have strengthened the research environment and expanded the potential impact of their collective inventions in material science.

Conclusion

Chiou-Mei Chen stands out as an influential inventor, creating methods that push the boundaries of technology in substrate treatments and cleaning processes. His contributions, evidenced by his innovative patents, reflect a deep understanding of material dynamics and a dedication to developing environmentally friendly solutions. As he continues his work at the Industrial Technology Research Institute, the innovations stemming from Chen's research will undoubtedly pave the way for future advancements.