Ching-Ya Huang

Title: Ching-Ya Huang: Innovator in Semiconductor Measurement Technologies

Introduction

Ching-Ya Huang is a notable inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor measurement technologies. With a total of 2 patents, Huang's work focuses on enhancing the precision and efficiency of critical dimension measurements in semiconductor manufacturing.

Latest Patents

Huang's latest patents include a "Method for measuring critical dimension" and an "Image-processing apparatus for measuring critical dimension." The method for measuring critical dimension involves several steps, including receiving a critical-dimension scanning electron microscopy (CD-SEM) image of a semiconductor wafer. It also includes performing an image-sharpening process and an image de-noise process on the CD-SEM image to generate a first image. Following this, an edge detection process is performed on the first image to create a second image. A connected-component labeling process is then applied to the second image to generate an output image, which is used to calculate a critical-dimension information table of the semiconductor wafer.

The recognition method of pattern feature is another innovative approach developed by Huang. This method is applied to optical proximity correction and includes providing a plurality of reference images with a reference pattern feature. The process involves recognizing and classifying the reference images by an image recognition device and storing the recognition results. The image recognition device then compares the image with the actual pattern feature using the stored recognition results to recognize and classify the actual pattern feature. Finally, it calculates an angle feature value and/or a distance feature value of the actual pattern feature based on the classification results.

Career Highlights

Ching-Ya Huang is currently employed at Winbond Electronics Corporation, where he continues to advance his research and development efforts in semiconductor technologies. His work has been instrumental in improving measurement techniques that are critical for the semiconductor industry.

Collaborations

Huang collaborates with Tso-Hua Hung, a talented woman in the field, contributing to the innovative projects at Winbond Electronics Corporation.

Conclusion

Ching-Ya Huang's contributions to semiconductor measurement technologies through his patents and work at Winbond Electronics Corporation highlight his role as a key innovator in the industry. His advancements in critical dimension measurement methods are paving the way for more precise semiconductor manufacturing processes.