The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2021
Filed:
Apr. 16, 2019
Winbond Electronics Corp., Taichung, TW;
Ching-Ya Huang, Taichung, TW;
Tso-Hua Hung, Taichung, TW;
Winbond Electronics Corp., Taichung, TW;
Abstract
A recognition method of pattern feature is provided, where a recognition result thereof is applied to optical proximity correction, the method includes: providing a plurality of reference images with a reference pattern feature; recognizing and classifying the reference images by an image recognition device, and storing the recognition result; comparing the image with the actual pattern feature with the stored recognition result by the image recognition device to recognize and classify the image with the actual pattern feature; and calculating an angle feature value and/or a distance feature value of the actual pattern feature by the image recognition device according to a classification result to obtain the recognition result of the pattern feature.