Company Filing History:
Years Active: 2022-2025
Title: Innovations of Ching-Liang Yi in Advanced Plasma Technology
Introduction
Ching-Liang Yi is a prominent inventor based in Hsinchu County, Taiwan. He has made significant contributions to the field of advanced plasma technology, holding a total of five patents. His innovative work focuses on enhancing processes that utilize atomic layer deposition (ALD) and atomic layer etching (ALE).
Latest Patents
Ching-Liang Yi's latest patents include a groundbreaking 2-in-1 (UV-assisted and plasma enhanced) ALD and ALE chamber. This invention features a UV-assisted and plasma-enhanced process method that involves providing a lower chamber and a reaction space defined therein. The design includes an upper cover with a window and vent holes, sealing the chamber opening to form a reaction chamber. The system incorporates an outer tube body and an inner tube body, with a UV light source positioned at the top end of the inner tube body. Additionally, an induction coil is placed around the outer tube body to facilitate gas mixing.
Another notable patent is a gas mixing method to enhance plasma. This method involves providing a reaction chamber with an accommodating space and a top opening. An adapter plate is fixed to the reaction chamber, which includes a window area for gas communication. The process entails premixing a plasma gas and an auxiliary gas into a gas mixture, which is then introduced into the accommodating space while providing a biasing field.
Career Highlights
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.