Ching Lang Yen

Title: Ching Lang Yen: Innovator in Semiconductor Technology

Introduction

Ching Lang Yen is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding 2 patents that enhance the performance and efficiency of integrated circuits.

Latest Patents

One of his latest patents focuses on retrograde trench isolation structures. This patent provides methods for creating these structures with improved electrical insulation properties. The process involves forming a retrograde trench in a silicon substrate and applying a layer of silicon oxide on the trench walls through thermal oxidation. This method results in a sealed trench that contains a vacuum or various gases, depending on the thermal oxidation conditions.

Another notable patent is a method aimed at improving the yield and performance of integrated circuit devices fabricated on semiconductor wafers. This method includes fabricating via plugs in openings of an intermetal dielectric layer, subjecting the wafer to chemical mechanical polishing (CMP) to isolate the via plugs, and then immersing the wafer in deionized water. The drying process utilizes isopropyl alcohol in a Marangoni-type dryer, which prevents static electricity from forming on the wafer, thereby enhancing the yield and performance of the IC devices.

Career Highlights

Ching Lang Yen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing technologies that are critical for modern electronic devices.

Collaborations

He has collaborated with notable colleagues, including Ling-Sung Wang and Shing Lee, who contribute to the innovative environment at their workplace.

Conclusion

Ching Lang Yen's contributions to semiconductor technology through his patents demonstrate his commitment to innovation and excellence in the field. His work continues to influence the performance of integrated circuits, making a lasting impact on the industry.