Location History:
- Hsin-Chu Hsien, TW (2002)
- Hsinchu County, TW (2011)
Company Filing History:
Years Active: 2002-2011
Title: **Innovative Contributions of Ching-Fang Chu in Semiconductor Technology**
Introduction
Ching-Fang Chu, located in Hsinchu County, Taiwan, is a notable inventor in the semiconductor industry. His innovative work has resulted in two significant patents that address critical challenges in semiconductor manufacturing and surface treatments.
Latest Patents
One of his latest patents involves a **semiconductor-device isolation structure**. This patent details a manufacturing method that begins with providing a substrate featuring at least one shallow trench isolation structure. A salicide process is performed to create a recess on the surface of this structure. Following that, a cap film is applied to cover the substrate and fill the recess. An etching process removes the cap film outside the recess while forming a contact etch stop layer that covers the substrate, ensuring a seamless finish without seams or voids.
Another notable patent describes a **method for avoiding water marks** during the cleaning process after well implantation. This method outlines the formation of a hydrophilic surface on a silicon substrate post-implantation. The process involves depositing an insulating layer for mask alignment and transferring a well pattern onto a photoresist layer. This design leads to an implanting step where changes in the silicon surface occur, transforming it from hydrophobic to hydrophilic. This innovation is crucial for ensuring cleaner substrates and enhancing product quality.
Career Highlights
Ching-Fang Chu currently works at **United Microelectronics Corporation**, a leading semiconductor company where he applies his knowledge and expertise. His contributions are vital to advancing semiconductor technology and improving manufacturing techniques.
Collaborations
Throughout his career, Chu has collaborated with prominent colleagues in the field, including Shui-Yen Lu and Guang-Wei Ye. These partnerships have allowed for a sharing of ideas and resources, fostering an environment of innovation and creativity within the semiconductor industry.
Conclusion
Ching-Fang Chu's inventive spirit and technical knowledge undeniably impact the semiconductor technology landscape. His patents not only enhance manufacturing processes but also improve product effectiveness, showcasing the critical role of inventors like him in driving technological advancement.