Company Filing History:
Years Active: 1998-1999
Title: Innovations of Chil-Keun Park
Introduction
Chil-Keun Park is a notable inventor based in Kyungki-do, South Korea. He has made significant contributions to the field of semiconductor technology, particularly in the development of X-ray masks. With a total of 3 patents to his name, Park's work has had a considerable impact on the industry.
Latest Patents
Chil-Keun Park's latest patents include innovative methods and materials for X-ray masks. One of his patents, titled "X-ray mask and its fabrication method," discloses X-ray masks that exhibit improved stability and reliability. This invention includes a membrane and an X-ray absorber pattern formed on the top side of a substrate, or an oxide layer positioned between the membrane and the X-ray absorber pattern. Another significant patent is "X-ray absorber in X-ray mask and method for manufacturing the same," which describes a method that involves a first layer of crystalline phase on a predetermined portion of the membrane's surface, along with a second layer of amorphous phase formed on the first layer.
Career Highlights
Chil-Keun Park is currently employed at LG Semicon Co., Ltd., where he continues to advance his research and development efforts in semiconductor technologies. His work has been instrumental in enhancing the performance and reliability of X-ray masks used in various applications.
Collaborations
Some of his notable coworkers include Don-Hee Lee and Young-Sam Jeon, who have collaborated with Park on various projects within the company.
Conclusion
Chil-Keun Park's contributions to the field of semiconductor technology, particularly through his innovative patents on X-ray masks, highlight his role as a leading inventor in the industry. His work continues to influence advancements in this critical area of technology.