Company Filing History:
Years Active: 2020-2025
Title: Chih-Yuan Yao: Innovator in Semiconductor Manufacturing
Introduction
Chih-Yuan Yao is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 4 patents. His innovative work focuses on improving processes within semiconductor fabrication, particularly in particle removal and system efficiency.
Latest Patents
One of Chih-Yuan Yao's latest patents is a particle removal method. This method involves loading a particle attracting member with a coating layer into a processing chamber of a processing apparatus. The processing chamber is designed to perform a lithography exposure process on a semiconductor wafer. The method includes fixing the particle attracting member on a reticle holder during a cleaning cycle, attracting particles in the chamber through a potential difference, and subsequently removing the member along with the attracted particles. Another notable patent is for a semiconductor manufacturing system. This system comprises a semiconductor processing apparatus that includes a processing chamber for semiconductor processes and a transferring module for wafer handling. The system also features a particle attracting member and a monitoring device that controls the cleaning cycle, ensuring efficient particle removal.
Career Highlights
Chih-Yuan Yao is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading entity in the semiconductor industry. His work has been instrumental in enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Chih-Yuan Yao has collaborated with notable colleagues, including Yu-Yu Chen and Hsiang-Lung Tsou. Their combined expertise contributes to the advancement of semiconductor technologies.
Conclusion
Chih-Yuan Yao's innovative contributions to semiconductor manufacturing highlight his role as a key inventor in the industry. His patents reflect a commitment to improving manufacturing processes and addressing challenges in semiconductor technology.