Chih-Wing Chang

Title: Chih-Wing Chang: Innovator in Mask Storage Technology

Introduction

Chih-Wing Chang is a prominent inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the development of innovative mask storage devices. With a total of 5 patents to his name, Chang continues to push the boundaries of technology in his industry.

Latest Patents

One of his latest inventions is a mask storage device designed for mask haze prevention. This device features a desiccant retainer that holds a desiccant, which is crucial for maintaining the integrity of masks used in lithography. The design includes a first shell and a second shell that are removably attached, creating a sealed space when closed. The desiccant retainer is strategically positioned within this sealed space, ensuring optimal performance. Additionally, the device incorporates a gasket that forms an airtight seal between the two shells. Another patent focuses on methods for preventing defect formation on masks, utilizing a similar storage device and sealing process.

Career Highlights

Chih-Wing Chang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in enhancing the reliability and efficiency of mask storage solutions, which are critical for high-precision manufacturing processes.

Collaborations

Chang has collaborated with notable colleagues, including Yung-Chih Chang and Cheng-Ming Wu. Their combined expertise has contributed to the advancement of technologies in semiconductor manufacturing.

Conclusion

Chih-Wing Chang's innovative contributions to mask storage technology exemplify his commitment to improving semiconductor manufacturing processes. His patents reflect a deep understanding of the challenges faced in the industry and offer practical solutions to enhance performance and reliability.