This inventor holds 1 USPTO granted patent. Top assignee: Asml Netherlands B.v.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Chih-hung Wang: Inventor in Charged-Particle Inspection
Introduction
Chih-hung Wang is an inventor based in San Jose, California. His patent work concerns inspection technology for charged-particle systems, including methods for controlling how a beam charges a sample surface.
Latest Patents
Wang is associated with 1 patent: “System and Method for Inspection by Deflector Control in a Charged Particle System.” The invention describes using deflector control to manage charging on a sample surface. A controller scans multiple nodes and adjusts the beam’s scan rate so that the charge deposited on different nodes can vary. It then generates and compares images to help detect defects associated with the scanned nodes.
Career Highlights
Wang is associated with ASML Netherlands B.V. His patent highlights work on beam control and image-based defect detection in charged-particle inspection systems.
Collaborations
Datong Zhang and Oliver Desmond Patterson are identified as Wang’s coworkers.
Conclusion
Chih-hung Wang’s patent work focuses on controlling charged-particle beams and comparing sample images to support defect detection.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile