Chih-Chuan Su

Title: Innovations of Chih-Chuan Su in Semiconductor Memory Structures

Introduction

Chih-Chuan Su is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in memory structures. With a total of two patents to his name, Su's work has implications for the advancement of memory devices.

Latest Patents

Chih-Chuan Su's latest patents focus on semiconductor memory structures and methods for their formation. One of his patents describes a semiconductor memory structure that includes bottom electrodes formed over a substrate. This structure features first magnetic tunneling junction (MTJ) elements positioned over the bottom electrodes in both a first and a second region of the substrate. Additionally, second MTJ elements are formed over the first MTJ elements in these regions. Notably, the first MTJ elements in the first region are narrower than the second MTJ elements in the same region, while the second MTJ elements in the second region are narrower than the first MTJ elements in that region.

The second patent outlines a method for forming a semiconductor memory structure, which involves creating an MTJ stack over a substrate. The process includes etching the MTJ stack to form an MTJ device, depositing a metal layer over the device's top surface and sidewalls, and oxidizing the metal layer to create an oxidized metal layer. Further steps include depositing a cap layer over the oxidized metal layer, oxidizing the cap layer, and removing any un-oxidized portions of the cap layer.

Career Highlights

Chih-Chuan Su is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this company has allowed him to contribute to cutting-edge technologies in semiconductor memory.

Collaborations

Su has collaborated with notable colleagues, including Yu-Jen Wang and Liang-Wei Wang, enhancing the innovative efforts within his team.

Conclusion

Chih-Chuan Su's contributions to semiconductor memory structures demonstrate his expertise and commitment to advancing technology in this critical field. His patents reflect innovative approaches that could shape the future of memory devices.