Chih-Cheng Chiu

Title: Chih-Cheng Chiu: Innovator in Semiconductor Lithography

Introduction

Chih-Cheng Chiu is a prominent inventor based in Taipei County, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in lithography methods. With a total of 7 patents to his name, Chiu continues to push the boundaries of innovation in this critical area of electronics.

Latest Patents

Chiu's latest patents focus on surface switchable photoresist technologies. One of his notable inventions describes lithography methods on a semiconductor substrate. These methods include coating a resist layer on the substrate, which comprises a resist polymer that turns soluble to a base solution in response to an acid. Additionally, it features a switchable polymer that includes a base soluble polymer with functional groups such as carboxylic acid, hydroxyl, lactone, or anhydride. The process involves performing a pre-exposure bake on the resist layer, exposing the resist-coated substrate, and developing the exposed substrate with a developing solution. Another patent provides a material for use in an immersion lithographic process of a semiconductor substrate. This material includes a photo-sensitive polymer that turns soluble to a base solution in response to an acid, along with either a base soluble polymer or an acid labile polymer.

Career Highlights

Chih-Cheng Chiu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing lithography techniques, which are essential for the production of integrated circuits. His innovative approaches have garnered attention and respect within the industry.

Collaborations

Chiu has collaborated with notable colleagues, including Kuei Shun Chen and Chin-Hsiang Lin. These partnerships have contributed to the development of cutting-edge technologies in semiconductor manufacturing.

Conclusion

Chih-Cheng Chiu is a key figure in the semiconductor industry, known for his innovative patents and contributions to lithography methods. His work continues to influence the future of semiconductor technology.