Company Filing History:
Years Active: 2020-2021
Title: Innovations of Chienlu Chang in MEMS Technology
Introduction
Chienlu Chang is a notable inventor based in Los Altos, California. He has made significant contributions to the field of Micro-Electro-Mechanical Systems (MEMS) technology. With a total of two patents to his name, Chang's work focuses on advanced methods for actuator layer patterning.
Latest Patents
Chang's latest patents include innovative methods for actuator layer patterning with topography. One patent describes a method that involves fusion bonding a handle wafer to a device wafer. This process includes forming standoffs on the device wafer and depositing hardmasks to create a MEMS device pattern. The etching process is carefully controlled to ensure precision in the MEMS device patterning. Another patent outlines a similar method, emphasizing the importance of standoff patterns and eutectic bond metal deposition. These patents reflect Chang's expertise in enhancing MEMS fabrication techniques.
Career Highlights
Chienlu Chang is currently employed at InvenSense, Inc., where he continues to innovate in the MEMS sector. His work has contributed to advancements in sensor technology, which are crucial for various applications in consumer electronics and automotive industries.
Collaborations
Chang collaborates with talented professionals in his field, including Daesung Lee and Dongyang Kang. These partnerships enhance the research and development efforts at InvenSense, Inc., fostering a collaborative environment for innovation.
Conclusion
Chienlu Chang's contributions to MEMS technology through his patents and work at InvenSense, Inc. highlight his role as a key innovator in the industry. His advancements in actuator layer patterning are paving the way for future developments in sensor technology.
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