Chien-Tung Huang

Title: Chien-Tung Huang: Innovator in Semiconductor Technology

Introduction

Chien-Tung Huang is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His innovative approaches have advanced the processes involved in wafer cleaning and shallow trench isolation.

Latest Patents

Huang's latest patents include a method of cleaning a wafer and an improved shallow trench isolation process. The method of cleaning a wafer involves loading the wafer into a reaction chamber, lifting it, and performing a dry clean process to clean the front side, back side, and bevel of the wafer. This process is followed by a deposition process, both of which are carried out in an in-situ manner. The second patent focuses on eliminating silicon nitride liner induced defects through an improved shallow trench isolation process. This invention details the steps of etching a trench into a semiconductor substrate, growing a thermal oxide liner, and altering the stress status of a silicon nitride liner to enhance the trench fill dielectric.

Career Highlights

Chien-Tung Huang is associated with United Microelectronics Corporation, a leading company in the semiconductor industry. His work has been instrumental in developing advanced technologies that improve semiconductor manufacturing processes.

Collaborations

Huang has collaborated with notable colleagues, including Ming-Te Chen and Yi-Ching Wu, contributing to various projects that enhance semiconductor technology.

Conclusion

Chien-Tung Huang's innovative work in semiconductor technology, particularly in wafer cleaning and trench isolation processes, showcases his expertise and commitment to advancing the field. His contributions continue to influence the industry positively.