Chien-Kwen Chen

Title: Innovations of Chien-Kwen Chen

Introduction

Chien-Kwen Chen is a notable inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor technology. His innovative work has led to the development of a unique patent that enhances the fabrication process of overlay structures in wafers.

Latest Patents

Chien-Kwen Chen holds a patent for an "Overlay structure and method of fabricating the same." This patent describes a method that includes forming overlay structures at the scribe lines of a wafer. Each side of a die region of the wafer is equipped with at least one overlay structure. Each overlay structure comprises at least one feature and at least one recess positioned above the feature. The feature and the recess are respectively located at the first and second layers of the wafer. The recess exposes a portion of the feature that is vertically aligned with the recess. The method also involves acquiring an image of the overlay structures, measuring dimensions of the recess, and determining an overlay between the first and second layers of the wafer's edge region. This process allows for modifications in subsequent lithography steps to compensate for any overlay discrepancies.

Career Highlights

Chien-Kwen Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited. His work at this leading semiconductor manufacturer has allowed him to apply his innovative ideas in a practical setting. His contributions have been instrumental in advancing the technology used in semiconductor fabrication.

Collaborations

Chien-Kwen Chen has collaborated with notable colleagues such as Te-Chia Ku and Chi-Chang Wu. These collaborations have fostered a productive environment for innovation and development within the semiconductor industry.

Conclusion

Chien-Kwen Chen's contributions to semiconductor technology through his patent and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as an influential inventor. His innovative methods continue to impact the industry positively.