Chien-Chung Su

Title: Innovations of Chien-Chung Su in MEMS Technology

Introduction

Chien-Chung Su is a prominent inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of microelectromechanical systems (MEMS) technology. With a total of 2 patents, his work focuses on integrating MEMS devices with semiconductor integrated circuits.

Latest Patents

Chien-Chung Su's latest patents include a method for fabricating a MEMS device integrated with a semiconductor integrated circuit. This innovative method involves providing a semiconductor substrate that comprises a MOS transistor. A MEMS device is then formed over the MOS transistor, which includes a bottom electrode in a second topmost metal layer, a diaphragm in a pad metal layer, and a cavity between the bottom electrode and the diaphragm. Another notable patent is for a semiconductor device that integrally constructs a MEMS device above the MOS transistor, featuring similar structural components.

Career Highlights

Chien-Chung Su is currently employed at United Microelectronics Corporation, a leading company in the semiconductor industry. His work at this organization has allowed him to further develop his expertise in MEMS technology and semiconductor integration.

Collaborations

Chien-Chung Su has collaborated with notable colleagues such as Tsong-Lin Shen and Chih-Cheng Wang. These partnerships have contributed to the advancement of his research and innovations in the field.

Conclusion

Chien-Chung Su's contributions to MEMS technology and semiconductor integration highlight his role as a key inventor in this field. His innovative patents and collaborations continue to influence advancements in technology.