Chien-Chen Chen

Title: Innovations of Chien-Chen Chen in Semiconductor Technology

Introduction

Chien-Chen Chen is a prominent inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the development of methods for processing copper interconnects and endpoint detection for copper chemical-mechanical polishing (CMP). With a total of four patents to his name, Chen's work has had a substantial impact on the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

One of Chen's latest patents is a method for endpoint detection for copper CMP. This innovative approach involves adding a copper isotope to the deposited copper layer to form a metal interface. The radioactivity emitted by the copper layer is measured during the polishing process, and the endpoint is determined when this radioactivity begins to rapidly decrease. Additionally, another method measures the radioactivity of the copper slurry removed during polishing, with the endpoint reached when the slurry's radioactivity starts to increase. Furthermore, Chen has developed a technique that involves adding copper isotopes to the copper seed layer, where the endpoint is identified by a rapid increase in the emitted radioactivity from the seed layer.

Another significant patent by Chen is a method for processing and integrating copper interconnects. This method eliminates the copper chemical-mechanical polishing process, thereby preventing copper diffusion. The process involves forming a semiconductor structure with a first metal layer, followed by the creation of a first inter-metal dielectric layer. A barrier/seed layer is then formed, and a self-align layer is applied to facilitate the electroplating of a copper layer onto the exposed barrier/seed layer.

Career Highlights

Chien-Chen Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate and contribute to advancements in semiconductor technology. His work has been instrumental in improving manufacturing processes and enhancing the performance of semiconductor devices.

Collaborations

Chen has collaborated with notable colleagues, including Fu-Sheng Lee and Jiun-Chung Lee, who have also contributed to advancements in semiconductor technology.

Conclusion

Chien-Chen Chen's innovative patents and contributions to semiconductor technology highlight his expertise and dedication to the field. His work continues to influence the industry, paving the way for more efficient manufacturing processes and improved semiconductor performance.