Chien-An Chen

Title: Innovations of Chien-An Chen in Optical Device Fabrication

Introduction

Chien-An Chen is a prominent inventor based in San Jose, California, known for his significant contributions to the field of optical device fabrication. With a total of 11 patents to his name, Chen has made remarkable advancements in the methods and processes used in the creation of optical devices.

Latest Patents

Among his latest patents, Chen has developed innovative methods for nanoimprint and etch fabrication of optical devices. These methods involve forming optical devices using nanoimprint lithography and etch processes. One embodiment of his method includes depositing a first resist layer on a substrate, which has a hardmask disposed thereon. The process continues with imprinting a first resist portion of the first resist layer with a first single-height stamp, followed by etching the first resist portion and the corresponding hardmask portion. After removing the first resist layer, a second resist layer is deposited, and similar steps are repeated to achieve the desired optical device structure. Additionally, Chen has worked on methods and apparatus for processing transparent substrates, such as glass. This includes a film stack for optical devices that features a glass substrate with a device function layer, a hard mask layer, and a backside layer, which may include conductive or oxide layers.

Career Highlights

Chien-An Chen's career is marked by his role at Applied Materials, Inc., where he has been instrumental in advancing optical device technologies. His expertise in nanoimprint lithography and etch processes has positioned him as a key figure in the development of innovative solutions for the optical industry.

Collaborations

Throughout his career, Chen has collaborated with notable colleagues, including Ludovic Godet and Rutger Meyer Timmerman Thijssen. These collaborations have further enhanced his work and contributed to the success of various projects in optical device fabrication.

Conclusion

Chien-An Chen's contributions to the field of optical device fabrication through his innovative patents and collaborative efforts have established him as a leading inventor in this domain. His work continues to influence the development of advanced optical technologies.