Location History:
- Chu Tung Town, TW (2002)
- Kaohsiung, TW (2001 - 2005)
Company Filing History:
Years Active: 2001-2005
Title: Innovations of Chie-Chi Chen in Semiconductor Technology
Introduction
Chie-Chi Chen is a notable inventor based in Kaohsiung, Taiwan, recognized for his contributions to semiconductor technology. With a total of three patents to his name, Chen has developed innovative solutions that enhance the efficiency and effectiveness of semiconductor processing.
Latest Patents
One of Chen's latest patents is a photoresist stripper using a nitrogen bubbler. This invention features a process and apparatus characterized by a gas distribution plate that directs gas bubbles from the bottom of a process tank upward and between wafers contained in a cassette. This improved method effectively strips photoresist from larger semiconductor wafers that have dense top conductive patterns with protuberant sidewalls. The method provides a scrubbing action that is parallel to the device array being formed on the wafer's surface. Broadly stated, the method involves a chemical action on large substrates supported adjacent to their respective edge portions in a carrier, which is submerged in a process tank containing a liquid chemical. The gas distribution plate directs gas bubbles upward and parallel to the surfaces of each substrate to ensure a uniform chemical action occurs.
Another significant patent is a wafer rinse tank for metal etching and the method for using it. This rinse tank is designed for rinsing electronic substrates after a chemical process and includes devices for performing a quick dump rinse, a cascade overflow rinse, and for feeding an inert gas bubbling. By utilizing this novel rinse tank, the processing problems frequently observed in conventional rinse tanks, which require two separate tanks for different rinsing methods, are eliminated. Furthermore, the wafer rinse process after a metal etching process can be accomplished in a total process time that is at least 2 to 3 minutes shorter than that required by conventional rinse tanks.
Career Highlights
Chie-Chi Chen is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His work focuses on improving processes that are critical to semiconductor manufacturing.
Collaborations
Chen has collaborated with notable coworkers, including Sheng-Liang Pan and Tzu-Yang Chung, who contribute to the innovative environment at their workplace.
Conclusion
Chie-Chi Chen's innovative patents and contributions to semiconductor technology demonstrate his significant impact on the industry. His work continues to advance the efficiency of semiconductor processing, making him a valuable inventor in this field.