Location History:
- Banciao, TW (2008)
- Taipei Hsien, TW (2010 - 2012)
- Taipei County, TW (2012 - 2014)
- New Taipei, TW (2015)
- Hsinchu, TW (2010 - 2024)
Company Filing History:
17 out of 4,573 
6 out of 40,635 
1 out of 6 
Years Active: 2008-2025
Title: Innovations by Chia-Yu Lee: A Pioneer in Lithography Technologies
Introduction
Chia-Yu Lee, a notable inventor located in Hsin-Chu, Taiwan, has made significant contributions to the field of lithography with a remarkable portfolio of 23 patents. His innovative work has not only advanced technology in semiconductor manufacturing but has also set new standards in the industry.
Latest Patents
Among his latest patents, Chia-Yu Lee has developed groundbreaking technologies aimed at improving EUV (Extreme Ultraviolet) wafer defect reduction and the effective collection of nonconductive particles. One of his notable inventions is an EUV lithographic apparatus featuring a wafer stage and a particle removing assembly designed to clean wafers for extreme ultraviolet lithography. This apparatus enhances the cleanliness of the wafer surface by efficiently directing debris away from the chamber and preventing contamination during the lithography process. The integration of particle removing electrodes, an exhaust device, and turbomolecular pumps allows for precise control of airflow and debris removal, significantly enhancing the overall performance of the lithographic process.
Career Highlights
Chia-Yu Lee has held prominent positions at leading companies within the semiconductor industry. He has contributed his expertise at Au Optronics Corporation and Taiwan Semiconductor Manufacturing Company Limited, where he played vital roles in the development of advanced manufacturing technologies.
Collaborations
Throughout his career, Chia-Yu Lee has collaborated with skilled professionals, including colleagues Chin-An Tseng and Yen-Heng Huang. These collaborations have fostered innovation and have been instrumental in driving forward the development of new technologies that address various challenges in lithography.
Conclusion
Chia-Yu Lee's dedication to innovation and his extensive experience in the semiconductor industry highlight his role as a key figure in advancing lithographic techniques. His latest patents reflect a commitment to improving manufacturing processes, ensuring the production of high-quality semiconductor devices. With a strong foundation in research and collaboration, Chia-Yu Lee continues to inspire and influence the future of technology in his field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.