Au Optronics Corporation

Taiwan Semiconductor Manufacturing Comp. Ltd.

Cheray Co. Ltd.

Chia-Yu Lee

Yen-Heng Huang

Chung-Kai Chen

Chin-An Tseng

Chia-Hui Pai

Tao-Hsin Chen

Ting-Jui Chang

Wen-Hsien Tseng

Ting-Yi Cho

Wei-Yuan Cheng

Chieh-Wei Chen

Hung-Lung Hou

Li-Jui Chen

Po-Lun Chen

Yi-Tsun Lin

Po-Chung Cheng

Yi-Pai Huang

Jenn-Jia Su

Tze-Chien Tsai

Ching-Juinn Huang

Pei-Chun Liao

Jeng-Fang Wu

Wan-Hua Lu

Chun-Jen Chiu

Chia-Hao Hsu

Chun-Hsiang Yang

Lee-Hsun Chang

Chao-Yuan Chen

Yi-Ju Chen

Chih-Hung Ting

Te-Wei Chan

Jui-Yi Wu

Kung-Ching Chu

Chih-Wei Shih

Chieh-Ting Chen

Ping-Yen Chou

Yen-heng Huang

An EUV lithographic apparatus includes a wafer stage and a particle removing assembly for cleaning a wafer for an extreme ultraviolet (EUV) lithographic apparatus. The wafer stage includes a measurement side and an exposure side. The particle removing assembly includes particle removing electrodes, an exhaust device and turbomolecular pumps. The particle removing electrodes is configured to direct debris from the chamber by suppressing turbulence such that the debris can be exhausted from the wafer stage to the outside of the processing apparatus. In some embodiments, turbomolecular pumps are turned off in the measurement side of the wafer stage so that an exhaust flow can be guided to an exposure side of the wafer stage. In some embodiments, the speed of voltage rise to the electrodes of the wafer chuck is adjusted.

EUV wafer defect improvement and method of collecting nonconductive particles

A method comprises loading a wafer onto a wafer chuck of a lithography apparatus, projecting an extreme ultraviolet light through an opening of a frame structure of the lithography apparatus, onto the wafer, and introducing an airflow from an air curtain module on the wafer chuck toward the frame structure, wherein the air curtain module surrounds the wafer. The airflow forms an air curtain around the wafer, and shields the wafer from contaminants from the frame structure or a wafer stage.

Lithography apparatus and method using the same

In some embodiments, a reticle structure is provided. The reticle structure includes a reticle stage and a reticle mounted on the reticle stage. The reticle stage includes plural first burls and plural second burls, in which the second burls are disposed on a center of the reticle stage and the first burls disposed on an edge of the reticle stage such that the first burls surround the second burls. The reticle includes a base material and a pattern layer overlying the base material. The base material is secured on the first and second burls of the reticle stage. The pattern layer includes plural first gratings, and each of the first burls is vertically aligned with one of the first gratings.

Reticle and method of detecting intactness of reticle stage using the same

A reticle stage is provided, including an electrostatic chuck and an acoustic wave transducer. The electrostatic chuck includes multiple chucking electrodes embedded in a dielectric body and configured to secure a reticle to a chuck surface of the dielectric body by electrostatic attraction. The acoustic wave transducer is disposed on the chuck surface and configured to impart a surface acoustic wave to the chuck surface to vibrate the chuck surface, thereby removing the reticle from the reticle stage.

Reticle stage and method for using the same

A stereoscopic display comprises a flat-panel display and an optical layer disposed thereon. The optical layer further includes a lens array layer and a micro-structure layer. The flat-panel display has a display plane. The lens array layer has a base and a plurality of lens with focusing function. The lens array layer adjusts the light field. The micro-structure layer connects to the lens array layer, and includes a substrate and a plurality of micro structures. The micro-structure layer modulates the direction of light so that a stereo image which allows an oblique angle of view natural to the user is displayed.

Stereoscopic display

The present invention provides a polymer stabilization alignment liquid crystal display panel having a plurality of pixel regions defined by plurals of data lines and gate lines. Each pixel region includes a main region and a sub region, and a first pixel electrode and a second pixel electrode correspond to the main region and the sub region respectively, wherein each of the data lines has a first width adjacent to the main display region and a second width adjacent to the sub display region, and the second width is larger than the first width. Each first pixel electrode is separated from the adjacent data line and thereby forming a gap therebetween. Each second pixel electrode partially overlaps the adjacent data line to form an overlap width. Accordingly, the present invention not only can increase the aperture ratio, but also well control the liquid crystal molecules located near the data lines.

Polymer stabilization alignment liquid crystal display panel and liquid crystal display panel

A pixel structure including a substrate, a scan line, a first data line, a second data line, a first pixel unit and a second pixel unit is provided. The first pixel unit includes a first active device and a first pixel electrode. The first active device is electrically connected to the scan line and the first data line. The first pixel electrode electrically connected to the first active device and has a plurality of first branches. The first branches outwardly extend from a center of the first pixel unit, and a projection of the first branches are separated from a projection of the adjacent first data line projecting onto the substrate, and the first pixel electrode is apart from the adjacent first data line with a distance. The second pixel unit located between the first data line and the second data line.

Pixel structure comprising a first pixel electrode having a plurality of first branches and a second pixel electrode having a plurality of second branches

A pixel structure including a substrate, a scan line, a first data line and a first pixel unit is provided. The scan line and the first data line are disposed on the substrate. The first pixel unit includes a first active device and a first pixel electrode. The first active device is electrically connected to the scan line and the first data line. The first pixel electrode electrically connected to the first active device has a first stripe pattern and a plurality of first branches. One side of the first stripe pattern is connected to the first branches extended toward the scan line, and the other side of the first stripe pattern is overlapped with the scan line. The overlapped width of the first stripe pattern with the scan line is substantially equal to 40% to 90% of the width of the first stripe pattern.

Pixel structure comprising a first pixel electrode having a main trunk portion, a branch portion, and a first stripe pattern that overlaps with a scan line

An exemplary active matrix organic light emitting diode (OLED) display includes a data line, a current sensing line, a power line and a plurality of pixels all electrically coupled to the data line, the current sensing line and the power line. During a data current is writing to a selected one of the pixels, the selected pixel draws a current from the current sensing line, and the data line supplies a particular data voltage to the selected pixel according to the drawn current from the current sensing line until the drawn current matched with the data current; the other non-selected pixels draw currents from the power line for light-emission. Moreover, a pixel circuit and a data current writing method adapted for the above-mentioned active matrix OLED display also are provided.

Active matrix organic light emitting diode (OLED) display, pixel circuit and data current writing method thereof

A color filter array on pixel array substrate including a substrate, an active device array, a color filter array and a pixel electrode layer is provided. The substrate has a plurality of pixel regions and a light-shielding region. The active device array is disposed on the substrate. The color filter array is disposed on the substrate, and includes a light shielding patterned layer and a plurality of color filter patterns, wherein the light-shielding patterned layer is disposed in the light-shielding region. The color filter patterns are respectively disposed in the pixel regions and extend from the pixel regions into the light shielding regions, wherein the color filter patterns extending from adjacent pixel regions constitute a stacked structure within the light shielding regions. The pixel electrode layer is electrically connected to the active device array.

Color filter array on pixel array substrate and display panel

A driving circuit is adapted to drive a current-driven device. The driving circuit includes a first power supply circuit and a second power supply circuit. The first power supply circuit is for supplying a first positive voltage to a first terminal of the current-driven device. The second power supply circuit is for enabling a current flowing along a first current flow direction in a first time period and thereby a second terminal of the current-driven device is given a second positive voltage. The second power supply circuit further is for enabling a current from the current-driven device flowing out of the second power supply circuit along a second current flow direction. The first current flow direction and the second current flow direction are different directions in the second power supply circuit. Moreover, a light emitting device using the above-mentioned driving circuit also is provided.

Driving circuit used for current-driven device and light emitting device

A dual-image flat display device includes a first and a second substrates parallel with each other, a liquid crystal layer having liquid crystal molecules, and at least a pixel disposed on the second substrate. The pixel includes pluralities of sub-pixels arranged side by side along a first direction. Each sub-pixel has a first azimuthal angle domain and a second azimuthal angle domain, wherein the first and second azimuthal angle domains are arranged side by side along a second direction in the sub-pixel, and the second direction is not parallel with the first direction. The azimuthal angles of liquid crystal molecules in the first and second azimuthal angle domains have an included angle less than 180&#xb0;.

Dual-image flat display device

The present invention provides a polymer stabilization alignment liquid crystal display panel having a plurality of pixel regions. Each pixel region includes a main region and a sub region, and a first pixel electrode and a second pixel electrode correspond to the main region and the sub region respectively. Each first pixel electrode is separated from the adjacent data line and thereby forming a gap therebetween. Each second pixel electrode partially overlaps the adjacent data line. In addition, each second pixel electrode includes a plurality of branches, and at least one edge of the branches may be parallel to the data lines. Accordingly, the present invention not only can increase the aperture ratio, but also well control the liquid crystal molecules located near the data lines. Therefore, the display quality of the liquid crystal display panel can be improved.

Growing community of inventors

Hsin-Chu, Taiwan

Chia-Yu Lee