Company Filing History:
Years Active: 2015-2019
Title: Innovations of Inventor Chia-Wen Li
Introduction
Chia-Wen Li is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 3 patents. His work focuses on improving the quality of wafer manufacturing processes, which is crucial for the production of integrated circuits.
Latest Patents
One of his latest patents is titled "Integrated platform for improved wafer manufacturing quality." This patent describes a method and apparatus for performing a dry plasma procedure while mitigating internal contamination of a semiconductor substrate. The apparatus includes a semiconductor processing tool with a dry process stage that performs a dry plasma procedure on a semiconductor substrate. A wafer transport system is utilized to move the substrates to a wet cleaning stage, where contaminants are removed, thereby enhancing wafer manufacturing quality.
Another significant patent is "Cleaning composition and method for semiconductor device fabrication." This patent outlines a method for cleaning semiconductor substrates using a mixture of ozone and either an acid or a base. The cleaning mixture may also include de-ionized water and is applied to a heated substrate surface, ensuring effective cleaning for integrated circuit fabrication.
Career Highlights
Chia-Wen Li is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this company has allowed him to develop innovative solutions that address critical challenges in wafer manufacturing.
Collaborations
Chia-Wen Li has collaborated with notable colleagues, including Shao-Yen Ku and Tsai-Pao Su. These collaborations have contributed to the advancement of semiconductor technologies and the improvement of manufacturing processes.
Conclusion
Chia-Wen Li's contributions to semiconductor manufacturing through his innovative patents demonstrate his expertise and commitment to enhancing wafer quality. His work continues to influence the industry positively.