Chia-Chun Wang

Title: Innovations of Chia-Chun Wang

Introduction

Chia-Chun Wang is a notable inventor based in Fremont, California. He has made significant contributions to the field of semiconductor processing, particularly in the area of etching techniques. With a total of two patents to his name, Wang's work is recognized for its innovative approaches to material processing.

Latest Patents

Wang's latest patents include a method for selective atomic layer etching. This method allows for the selective etching of a dielectric layer with respect to an epitaxial layer or metal-based hardmask. The process involves performing multiple cycles, each consisting of a deposition phase and an activation phase. During the deposition phase, a deposition gas, which includes helium and a hydrofluorocarbon or fluorocarbon, is flowed to create a plasma that facilitates the deposition of a fluorinated polymer. The activation phase involves the use of an activation gas that causes ion bombardment, activating fluorine from the polymer to etch the dielectric layer.

Another significant patent by Wang is related to etching features into a porous low-k dielectric layer. This method also employs a series of cycles in a plasma processing chamber. The deposition phase involves flowing a gas that contains fluorocarbon and/or hydrofluorocarbon, creating a plasma to deposit a layer. The activation phase uses an activation gas that includes a noble gas and a carbon etching additive, which etches the low-k dielectric layer while consuming the deposited layer.

Career Highlights

Chia-Chun Wang is currently employed at Lam Research Corporation, a leading company in semiconductor manufacturing equipment. His work at Lam Research has positioned him as a key player in advancing etching technologies that are crucial for modern electronics.

Collaborations

Wang has collaborated with notable colleagues, including Eric A. Hudson and Shashank C. Deshmukh. These collaborations have contributed to the development of innovative solutions in the semiconductor industry.

Conclusion

Chia-Chun Wang's contributions to the field of semiconductor processing through his patents and work at Lam Research Corporation highlight his role as an influential inventor. His innovative methods for etching techniques continue to impact the industry significantly.