Chia-Chiung Lo

Title: The Innovative Contributions of Chia-Chiung Lo

Introduction

Chia-Chiung Lo is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of six patents. His work focuses on enhancing the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

Among his latest patents, Chia-Chiung Lo has developed a polisher, polishing tool, and polishing method. This innovative polisher includes a wafer carrier, a polishing head, a movement mechanism, and a rotation mechanism. The wafer carrier features a supporting surface designed to carry a wafer. The polishing head, positioned above the wafer carrier, has a polishing surface that is smaller than the supporting surface of the wafer carrier. The movement mechanism allows for relative movement between the polishing head and the wafer carrier, while the rotation mechanism enables the polishing head to rotate relative to the wafer carrier.

Another notable patent is an advanced exhaust system for semiconductor processes. This apparatus includes an exhaust pipe connected to a reaction chamber and a pump. A pressure control valve regulates the pressure within the reaction chamber. The system also features a first pipe that connects the exhaust pipe to an etching gas source, a second pipe that provides radicals into the exhaust pipe, and a third pipe that supplies diluted gas into the exhaust pipe.

Career Highlights

Chia-Chiung Lo is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this company has allowed him to apply his innovative ideas and contribute to advancements in semiconductor manufacturing.

Collaborations

Throughout his career, Chia-Chiung Lo has collaborated with notable colleagues, including Shih-Wei Hung and Chien-Feng Lin. These collaborations have further enhanced his research and development efforts in the semiconductor field.

Conclusion

Chia-Chiung Lo's contributions to semiconductor technology through his patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as an influential inventor. His innovative solutions continue to shape the future of semiconductor manufacturing.