Company Filing History:
Years Active: 2015
Title: Chia-Chiun Chen: Innovator in Semiconductor Technology
Introduction
Chia-Chiun Chen is a notable inventor based in Fengshan, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the area of film deposition apparatuses. His innovative work has led to advancements that enhance the efficiency of semiconductor manufacturing processes.
Latest Patents
Chia-Chiun Chen holds a patent for a "Semiconductor film deposition apparatus and method with improved heater cooling efficiency." This invention provides a physical vapor deposition apparatus with one or multiple deposition chambers designed for depositing films on substrates. The apparatus features a heater and various cooling mechanisms to effectively cool the chamber, heater, and substrate. The design includes cooled sidewalls and top of the chamber, a cooling plate integrated into the heater, and a fitted heated cover positioned between the heater and the substrate. A cooling pipe circulates coolant throughout the cooling plate, occupying about 14-20% of its area, ensuring that no point on the cooling plate surface is more than 15-20 mm from the cooling pipe. This innovative cooling system allows for rapid cooling of the heater, enabling long-duration deposition operations at high power.
Career Highlights
Chia-Chiun Chen is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His work at this prestigious company has allowed him to contribute to cutting-edge technologies that are essential for modern electronics.
Collaborations
Chia-Chiun Chen has collaborated with notable colleagues, including Pao-Tsung Lai and Ching-Chung Cheng. These partnerships have fostered a collaborative environment that enhances innovation and drives advancements in semiconductor technology.
Conclusion
Chia-Chiun Chen's contributions to semiconductor technology, particularly through his patented innovations, highlight his role as a key inventor in the field. His work continues to influence the efficiency and effectiveness of semiconductor manufacturing processes.